【Introduction】：
The special design of diffusion furnace is used to diffuse and oxidate the semiconductor material, it also can be used in manifold LPCVD technics, such as the nitride-silicon, in solar battery industry, furnace adopts FEC ceramic fiber tube to keep temperature, KANTHEL, furnace hearth adopts quartz tube, and it can pre-vacuumize to participate the sediment gas.
Temperature control system adopts single return circuit intelligent temperature control instrument, temperature zone design and clapboard structure, and constant temperature zone design, all the above are imported from Japan. Import or China Air-powder control system, flow meter control about quality. Equal temperature, smooth control, rapid warm-up, save-energy, long life, all those characteristic satisfy the requirement of corporation. |
